Technologiemanagement und anwendungsspezifische Prozessentwicklung in der Mikrosystemtechnik

With MEMS entering fast moving consumer markets, the need for a more efficient design approach becomes apparent. One of the biggest challenges in this context is the huge impact of the manufacturing technology on all aspects of product design. Nearly every application area requires a specific manufacturing technology. According to recent market reports this so-called MEMS Law ("one product, one process!") still rules. Without a common technology platform in sight, the only
feasible solution seems to be the extensive modularization and re-use of existing manufacturing technology.
In this thesis, a comprehensive software framework for management, development, and verification of MEMS manufacturing technologies is presented. This PDES(Process Development Execution System) is based on previous research on datamanagement and design-support by Popp, Wagener, and Ortloff. One of the two main contributions of this thesis to the PDES is a new simulation interface that allows
setting up and performing virtual experiments and optimization with minimum knowledge of the TCAD-tools.
The second contribution of this thesis is a new visual approach on process modeling build on top of the PDES. The new approach supports the device engineer in selecting an appropriate manufacturing technology based on a set of device-cross-sections. For this purpose dedicated software tools have been developed that are able to automatically analyze the cross-sections and map the analysis results to specific technologies. The results are used to synthesize abstract process-templates that form the basis for the development of a new application specific fabrication process. The approach is especially targeted at emerging MEMS business models like the fabless-design-house that do not have direct access to technology knowledge. In combination with the PDES, the presented approach resembles the first step in
design-support for fabless MEMS that explicitly includes the development of an application specific manufacturing process.