Fertigungsnahe Entwurfsunterstützung für die Mikrosystemtechnik

In microsystem technology, especially in the area of silicon-based nonelectronic devices, the
design is dominated by the fabrication of the devices. That is not only true for the technologydriven
and physical design phases but also for the more abstract phases in the beginning of the
design. In contrast to micro electronics there is no Mead/Conway-abstraction possible. That is
why available design frameworks are limited to the behavioural-driven and more abstract
design.
A new concept of an integrated design support for microsystem technology and a
prototypically realisation of that concept is presented. Designing Microsystems with this tool
the designer need not longer to be technology expert.
Basing on design methodology in micro electronics and mechanics as well considerations on
the design in microsystem technology are discussed. A new methodology for technologydriven
design is presented and by the means of a prototype realised. This prototype allows the
management of process data as well as the design of fabrication process flows. Also the
manufacturability of these flows can be checked. The concept of hierarchical ordered
simulation models is introduced to guarantee at least a rough simulation of process flows,
even if there is no model for one or more fabrication steps available.